◆CMP Process Machine
ー AMAT (Mirra) Stand alone Type and On-trak Cleanning Machine and
ー Mirra Mesa Series Modification、 DNS Corporate’S AS-2000 Relocation
ー Wafer Type Modificaton(notch→flat Type) and 6 inch→8 inchi Modification
ー Reflexion LK 300mm Relocation
ー（EBARA） CMP EPO-113/222、F-REX 200 Series Head Upgrade(Normal→I-Head)、
ー Size(inch)Modification、Relocation→Supply of processes and parts
ー F-REX 300mm S1/S2 Relocation
◆ION Implanter
ー SEN(Axcelis NOVA)Machine：NV-GSD HE/LE inch Modification
ー Used Machine Refurbish、Relocation、Supply of Parts
ー VARIAN Machine：E220(500)、E1000、120XP Provision of consumable parts
and overhaul of parts
ー Used Machine Refurbish、Relocation
◆PVD/CVD/RTP Process Machine
ー (Endura5500)Relocation and Chamber Upgrade
ー (Centura5200)、(Producer) Chamber Upgrade
ー (Mattson) SHS2000、2800 Modification and Reloaction
ー Parts Repair and production・supply
◆Measuring Machine(Hitachi SEM)、(Therma-Wave)、(KLA-TENCOR)
ー S-8820、8840、9200 Model Modification・Relocation、Supply of Parts
ー OP 2600, 3290/TP420 Relocation、AIT-XP’s parts supply
◆Etcher Process Machine
ー Hitachi M501, 502, 602A Used Machine Refurbish、Modification、Relocation
ー P5000,Centura5200 DPS, DPS +Chamber Upgrade and Relocation
ー LAM TCP9600, Rainbow Series Refurbish、Size(inch) Modification、Relocation
